This device measures the thickness of wafers and display panels after partial processes such as wafer slicing, grinding, thinning, and slicing. Can synchronously test the TTVBOWWRAP/SORI and other parameter errors of the material itself.
| Project | Performance index | 
| Use ceramic disc size | φ260/268/305/360mm, Automated loading and unloading of robotic arms | 
| Equipment measurement resolution | 0.005um | 
| Measurement repeatability | ≤0.5um | 
| Measurement accuracy | ≤ 1um (measurement comparison accuracy is affected by ceramic disc and wax layer) | 
| Measuring range | 0-1000um | 
| Number of measurement points | 1. 3, 5, 9... N (number of points can be set) | 
| Measurement efficiency | Fastest 18sec/p, 5-point sampling | 
| Measure bandwidth | Max 10000Point/sec | 
| Measure material | Transparent, non transparent, smooth, rough samples such as GaN, GaAs, Si, SiN, Sic, etc | 
